Microsystem Technology and Microrobotics (книга)
Microsystem Technology and Microrobotics | |
Автор: | S. Fatikow U. Rembold Ulrich Rembold |
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Оригинал издан: | ???? |
«Microsystem Technology and Microrobotics» — книга ???? года.
Содержание |
Содержание 
От издателя 
«Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and…»